In open loop, the MIM of the mirror mount is 2µrad over a ±0.75º range and in closed loop,the MIM is 0.001º with a bi-directional repeatability of 0.01º. With the absolute position sensor, the user can also save a position into memory and recall that position upon start-up without having to rely on a home or reference location. This is beneficial when a previously optimized beam path must be re-established.
According to Beda Espinoza, Senior Manager, Motion, at Newport Corporation, “Integrating the Agilis mirror mount and the CONEX controller platform, both developed with simplicity in mind, makes the CONEX-AG-M100D very affordable. Combined with the NSTRUCT Instrument Management software platform, setting up becomes much easier, leading to less time wasted and a faster implementation of experiments.”