The system will add new process capability to ISIT’s MEMS manufacturing line to fuel next generation development of devices such as actuators, sensors and energy harvesters.
“We have chosen to add APS to extend our offerings to the full range of deep etch processing for all MEMS and related technologies. We are now capable of not only high-performance deep silicon etching, but also for challenging etches in hard materials, such as piezoelectric films, oxide films, glass and Pyrex,” explained Christian Schroeder the MEMS Technology Manager at FhG-ISIT.
Kevin T. Crofton, executive vice president, and managing director of Single Wafer Division at SPTS said, “We are pleased to strengthen our existing relationship with this important R&D customer. The APS source offers unique processing capabilities with its patent-protected source design, proving to be extremely effective for customers who work with a variety of materials that are difficult to etch using conventional Inductively Coupled Plasma (ICP) tools.”
Company Contact: Evelyn Tay, + 65-8383-0393, Evelyn.Tay@spp-pts.com
SPP Process Technology Systems was established in October 2009 as the vehicle for the merger of Surface Technology Systems and acquired assets of Aviza Technology. The company is a wholly-owned subsidiary of Sumitomo Precision Products Co., Ltd, and designs, manufactures, sells, and supports advanced semiconductor capital equipment and process technologies for the global semiconductor industry and related markets. These products are used in a variety of market segments, including R&D, data storage, MEMS and nanotechnology, advanced 3-D packaging, LEDs, and power integrated circuits for communications.
For more information on SPTS, please visit www.spp-pts.com