Tegal gets repeat order for 3200 SE DRIE process module

Wed, 11/17/2010 - 3:27am
Medical Design Technology

In a release, the company said the Tegal 3200 SE DRIE process module will be shipped and installed at the customer's site in early CY2011, and will support the customer's plans for ramping production capacity for High Volume Manufacturing of MEMS image sensors.

The Tegal 3200 SE cluster tool silicon DRIE process module order from this repeat Tegal DRIE customer follows the successful installation, process qualification, and sustained use of silicon Deep Reactive Ion Etch processes on the customer's first Tegal 3200 SE cluster tool PM.

"Our customer is known for their technological leadership in the MEMS image sensor market, and we see this repeat order as confirmation of the Tegal silicon DRIE tool's superior performance in high volume manufacturing for this technically challenging application," said Jim Apffel, DRIE Product Manager at Tegal Corp. "We believe that our DRIE process modules are the most reliable and most advanced on the market and, as this repeat order shows, we have been able to meet our customer's demanding technical requirements for silicon DRIE cluster tools, while providing excellent value along the way."

Tegal Corp. is headquartered in Petaluma, Calif.

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