Vertical Lift Stage Offers 2 nm Resolution
ANT130-5-V stages utilize advanced direct-drive technology, pioneered by Aerotech, as well as anti-creep crossed-roller bearings to achieve the highest level of positioning performance. Aerotech direct-drive technology is non-cogging, noncontact, high-speed, high-resolution, and high-accuracy. The lack of hysteresis or backlash enables accurate and repeatable nanometer motion. The unique drive and bearing combination, packaged in an extremely compact profile and footprint, offers tangible advantages in high-precision positioning applications.
The ANT130-5-V family has universal mounting and tabletop patterns that allow for easy system integration. Two, three, or more axes can be easily combined for flexible system designs and multi-axis configurations.
Outstanding accuracy, position repeatability, and in-position stability require high system resolution. The ANT130-5-V stage’s industry-leading 2 nm minimum incremental step size provides this high level of performance.